Piezoresistive silicon nanowire resonators as embedded building blocks in thick SOI
2018
Details
Title
Piezoresistive silicon nanowire resonators as embedded building blocks in thick SOI
Author(s)
Esfahani, MN ; Kilinc, Y ; Karakan, MC ; Orhan, E ; Hanay, MS ; Leblebici, Y ; Alaca, BE
Published in
Journal of Micromechanics and Microengineering
Volume
28
Issue
4
Pages
045006
Date
2018
Other identifier(s)
View record in Web of Science
Laboratories
LSM
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > LSM - Microelectronic Systems Laboratory
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Record creation date
2018-11-08