000259687 001__ 259687
000259687 005__ 20181203025142.0
000259687 02470 $$2isi$$a000425326300001
000259687 0247_ $$2doi$$a10.1088/1361-6439/aaab2f
000259687 037__ $$aARTICLE
000259687 245__ $$aPiezoresistive silicon nanowire resonators as embedded building blocks in thick SOI
000259687 269__ $$a2018
000259687 260__ $$c2018
000259687 336__ $$aJournal Articles
000259687 700__ $$aEsfahani, MN
000259687 700__ $$aKilinc, Y
000259687 700__ $$aKarakan, MC
000259687 700__ $$aOrhan, E
000259687 700__ $$aHanay, MS
000259687 700__ $$aLeblebici, Y
000259687 700__ $$aAlaca, BE
000259687 773__ $$k4$$j28$$tJOURNAL OF MICROMECHANICS AND MICROENGINEERING
000259687 909C0 $$xU10325$$0252051$$pLSM
000259687 909CO $$pSTI$$particle$$ooai:infoscience.epfl.ch:259687
000259687 973__ $$aEPFL$$rREVIEWED$$sPUBLISHED
000259687 980__ $$aARTICLE
000259687 980__ $$aWoS