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000259676 005__ 20181203025142.0
000259676 02470 $$2isi$$a000436924400001
000259676 0247_ $$2doi$$a10.1109/JSTQE.2018.2808258
000259676 037__ $$aARTICLE
000259676 245__ $$aPhotonic Damascene Process for Low-Loss, High-Confinement Silicon Nitride Waveguides
000259676 269__ $$a2018
000259676 260__ $$c2018
000259676 336__ $$aJournal Articles
000259676 700__ $$aPfeiffer, MHP
000259676 700__ $$aHerkommer, C
000259676 700__ $$aLiu, J
000259676 700__ $$aMorais, T
000259676 700__ $$aZervas, M
000259676 700__ $$aGeiselmann, M
000259676 700__ $$aKippenberg, TJ
000259676 773__ $$tIEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS$$j24$$k4
000259676 909C0 $$xU11831$$xU11892$$0252348$$pLPQM
000259676 909CO $$pSB$$pSTI$$particle$$ooai:infoscience.epfl.ch:259676
000259676 973__ $$aEPFL$$rREVIEWED$$sPUBLISHED
000259676 980__ $$aARTICLE
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