Photonic Damascene Process for Low-Loss, High-Confinement Silicon Nitride Waveguides
2018
Details
Title
Photonic Damascene Process for Low-Loss, High-Confinement Silicon Nitride Waveguides
Author(s)
Pfeiffer, MHP ; Herkommer, C ; Liu, J ; Morais, T ; Zervas, M ; Geiselmann, M ; Kippenberg, TJ
Published in
IEEE Journal of Selected Topics in Quantum Electronics
Volume
24
Issue
4
Pages
6101411
Date
2018
Other identifier(s)
View record in Web of Science
Laboratories
LPQM
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > LPQM - Laboratory of Photonics and Quantum Measurements (STI/SB)
Scientific production and competences > SB - School of Basic Sciences > IPHYS - Institute of Physics > LPQM - Laboratory of Photonics and Quantum Measurements (STI/SB)
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Scientific production and competences > SB - School of Basic Sciences > IPHYS - Institute of Physics > LPQM - Laboratory of Photonics and Quantum Measurements (STI/SB)
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Record creation date
2018-11-08