Freestanding optical micro-disk resonators in single-crystal diamond by reactive ion etching and multidirectional focused ion-beam milling
2018
Details
Title
Freestanding optical micro-disk resonators in single-crystal diamond by reactive ion etching and multidirectional focused ion-beam milling
Author(s)
Graziosi, T ; Mi, Sichen ; Kiss, M ; Quack, Niels
Published in
Advances in Photonics of Quantum Computing, Memory, and Communication XI
Series
SPIE Proceedings, 10547
Pages
105470R
Conference
SPIE OPTO 27, January - 1 February 2018, San Francisco, California, United States
Date
2018
Other identifier(s)
View record in Web of Science
Laboratories
Q-LAB
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > Q-LAB - Quack Group
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Record creation date
2018-11-08