Combination of thermal scanning probe lithography and ion etching to fabricate 3D silicon nanopatterns with extremely smooth surface
2018
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Details
Title
Combination of thermal scanning probe lithography and ion etching to fabricate 3D silicon nanopatterns with extremely smooth surface
Author(s)
Lisunova, Y. ; Brugger, J.
Published in
Microelectronic Engineering
Volume
193
Pages
23-27
Date
2018-06-05
Keywords
Other identifier(s)
DOI: https://doi.org/10.1016/j.mee.2018.02.012
Laboratories
LMIS1
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > LMIS1 - Microsystems Laboratory 1
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Record creation date
2018-07-03