Details
Title
Pernollet, Joffrey
Sciper ID
203491
Affiliated labs
CMI
Publications
Combining thermal scanning probe lithography and dry etching for grayscale nanopattern amplification
Multi- and Gray-Scale Thermal Lithography of Silk Fibroin as Water-Developable Resist for Micro and Nanofabrication
Multi- and Gray-Scale Thermal Lithography of Silk Fibroin as Water-Developable Resist for Micro and Nanofabrication
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