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A monolithic MEMS position sensor for closed-loop high-speed atomic force microscopy
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A monolithic MEMS position sensor for closed-loop [...]
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Hosseini, N
et al
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A monolithic MEMS position sensor for closed-loop high-speed atomic force microscopy
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A monolithic MEMS position sensor for closed-loop high-speed atomic force microscopy .pdf
[3.85 MB]
03 Nov 2020, 14:31