Fabrication of 2D Material Based NEMS Resonators

2D materials such as graphene, MoS2 and phosphorene are promising candidates for resonating mechanical sensors due to excellent tunable electrical/- mechanical properties, low masses, and maximal surface to volume ratios. Mechanical resonators based on supsended graphene have been realized. - CVD graphene wet-transferred onto 10x10 mm Si/SiO2 chips with Au electrodes - Graphene patterned in O2 plasma with a resist mask - Graphene is released by etching SiO2 in BHF and critical point drying


Advisor(s):
Villanueva, Guillermo
Year:
Sep 14 2017
Keywords:
Laboratories:




 Record created 2018-03-06, last modified 2019-04-15

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