000253041 001__ 253041
000253041 005__ 20190619220013.0
000253041 037__ $$aPOST_TALK
000253041 245__ $$aMolybdenum Disulfide (MoS2) Nanoelectromechanical Resonators With On-Chip Aluminum Nitride (AlN) Piezoelectric Excitation
000253041 260__ $$c2018-01-21
000253041 269__ $$a2018-01-21
000253041 336__ $$aPosters
000253041 513__ $$aPosters
000253041 520__ $$aWe report on the first experimental demonstration of vibrating two-dimensional nanoelectromechanical systems (2D NEMS) with on-chip piezoelectric excitation. Combining a wafer-scale aluminum nitride (AlN) thin film technology with an all-dry transfer technique for atomic layer 2D semiconductors, we fabricate and piezoelectrically excite few-atomic-layer molybdenum disulfide (MoS2) NEMS resonators in the high frequency (HF) band. Multimode resonances up to 38MHz are observed, with efficient electromechanical drive from the AlN layer off the vibrating 2D NEMS device region (to avoid compromising the movable 2D device by electrodes needed for on-chip excitation and readout). The piezoelectrically excited 2D NEMS resonators may enable remotely driven, ultrasensitive transducers. Combined with on-chip electrical readout techniques (e.g., mixing), this device platform also holds promise for future radio frequency (RF) electronics and integrated systems.
000253041 6531_ $$aNanoelectromechanical Systems, on-chip piezoelectric excitation, molybdenum disulfide, 2D resonator, interferometer
000253041 700__ $$aJia, Hao
000253041 700__ $$aZheng, Xu-Qian
000253041 700__ $$g266019$$aFaizan, Muhammad$$0250359
000253041 700__ $$g264088$$aLarsen, Tom$$0249379
000253041 700__ $$0240380$$aVillanueva, Guillermo$$g176631
000253041 700__ $$aFeng, Philip X. L.
000253041 7112_ $$d21-25 January, 2018$$cBelfast, Ireland$$aThe 31st IEEE International Conference on Micro Electro Mechanical Systems
000253041 8560_ $$fguillermo.villanueva@epfl.ch
000253041 909C0 $$0252546$$pNEMS
000253041 909C0 $$0252546$$xU12739$$pNEMS$$mguillermo.villanueva@epfl.ch
000253041 909CO $$ppresentation$$pposter$$ooai:infoscience.epfl.ch:253041$$pSTI
000253041 960__ $$aandrea.lozzi@epfl.ch
000253041 961__ $$apierre.devaud@epfl.ch
000253041 973__ $$aOTHER$$sACCEPTED
000253041 980__ $$aPOST_TALK
000253041 981__ $$aoverwrite