Details
Title
Matloub Aghdam, Ramin
Sciper ID
194878
Affiliated labs
LC
Publications
50 nm thick AlN Films for Actuation and Detection of Nanoscale Resonators
Abnormal Grain Growth in AlScN Thin Films Induced by Complexion Formation at Crystallite Interfaces
Effect of AlN seed layer on crystallographic characterization of piezoelectric AlN
Growth and properties of AlScN thin films for microwave transducers and piezoelectric energy harvesting
Optimization of Resonant PZT MEMS Mirrors by Inverse Design and Electrode Segmentation
Piezoelectric AlScN thin films: A semiconductor compatible solution for mechanical energy harvesting and sensors
Resonant Pzt Mems Mirror With Segmented Electrodes
Abnormal Grain Growth in AlScN Thin Films Induced by Complexion Formation at Crystallite Interfaces
Effect of AlN seed layer on crystallographic characterization of piezoelectric AlN
Growth and properties of AlScN thin films for microwave transducers and piezoelectric energy harvesting
Optimization of Resonant PZT MEMS Mirrors by Inverse Design and Electrode Segmentation
Piezoelectric AlScN thin films: A semiconductor compatible solution for mechanical energy harvesting and sensors
Resonant Pzt Mems Mirror With Segmented Electrodes
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