Notice détaillée
Titre
Sobbia, Raffaello
Sciper ID
158888
Publications
3D numerical simulation of plasma enhanced chemical vapour deposition (PPECVD) applied to large-area showerhead reactors
Experimental Investigation of Ionizing Radiating Hypersonics Flow By Mean of a Langmuir Probe
Hydrogen-dominated plasma, due to silane depletion, for microcrystalline silicon deposition
Uniformity study in large-area showerhead reactors
Experimental Investigation of Ionizing Radiating Hypersonics Flow By Mean of a Langmuir Probe
Hydrogen-dominated plasma, due to silane depletion, for microcrystalline silicon deposition
Uniformity study in large-area showerhead reactors
Employé pour
Sobbia, R.
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