Details
Title
Derendinger, Lukas
Sciper ID
119509
Affiliated labs
SPC
Publications
Measurements and consequences of nonuniform radio frequency plasma potential due to surface asymmetry in large area radio frequency capacitive re[...]
Probe measurements of plasma potential nonuniformity due to edge asymmetry in large-area radio-frequency reactors: the telegraph effect
Probe measurements of plasma potential nonuniformity due to edge asymmetry in large-area radio-frequency reactors: the telegraph effect
Use for
Derendinger, L.
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