Details
Title
Strahm, Benjamin
Sciper ID
119771
Affiliated labs
SPC
Publications
Fast equilibration of silane/hydrogen plasmas in large area RF capacitive reactors monitored by optical emission spectroscopy
Interdigitated back contact silicon heterojunction solar cells featuring an interband tunnel junction enabling simplified processing
Investigation of radio-frequency, capacitively-coupled large area industrial reactor: cost-effective production of thin film microcrystalline sil[...]
Investigations of radio-frequency, capacitively-coupled large area industrial reactor
Optimization of microcrystaline silicon deposition efficiency
Optimization of the microcrystalline silicon deposition efficiency
Plasma diagnostics as a tool for process optimization:
Plasma silane concentration as a determining factor for the transition from amorphous to microcrystalline silicon in SiH4/H-2 discharges
Powder formation in SiH[sub 4]–H[sub 2] discharge in large area capacitively coupled reactors: A study of the combined effect of interelectrode d[...]
Uniformity of silicon microcrystallinity in large area RF capacitive reactors
See complete list of publications (14)
Interdigitated back contact silicon heterojunction solar cells featuring an interband tunnel junction enabling simplified processing
Investigation of radio-frequency, capacitively-coupled large area industrial reactor: cost-effective production of thin film microcrystalline sil[...]
Investigations of radio-frequency, capacitively-coupled large area industrial reactor
Optimization of microcrystaline silicon deposition efficiency
Optimization of the microcrystalline silicon deposition efficiency
Plasma diagnostics as a tool for process optimization:
Plasma silane concentration as a determining factor for the transition from amorphous to microcrystalline silicon in SiH4/H-2 discharges
Powder formation in SiH[sub 4]–H[sub 2] discharge in large area capacitively coupled reactors: A study of the combined effect of interelectrode d[...]
Uniformity of silicon microcrystallinity in large area RF capacitive reactors
See complete list of publications (14)
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Strahm, B.
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