Effective SAW excitation on non-piezoelectric substrate using AlScN piezoelectric thin film BAW/SAW hybrid transducer
Pashchenko, Vladimir; Parsapour, Fazel; Ballandras, Sylvain; Haffner, Ken; Muralt, Paul
2017

Abstract

Acoustic delay lines based on Al0.85Sc0.15N thin film hybrid transducers were investigated by finite element modeling. It was found that an acoustic impedance matching between transducer and non-piezoelectric substrate material plays a crucial role to efficiently excite a traveling surface acoustic wave (SAW) through the BAW piston motion. Test devices based on the 2.5 um thick Al0.85Sc0.15N piezoelectric film on the silicon substrate were fabricated and characterized.

Details

Title Effective SAW excitation on non-piezoelectric substrate using AlScN piezoelectric thin film BAW/SAW hybrid transducer
Author(s) Pashchenko, Vladimir ; Parsapour, Fazel ; Ballandras, Sylvain ; Haffner, Ken ; Muralt, Paul
Published in 2017 Ieee International Ultrasonics Symposium (Ius)
Pagination 3
Series IEEE International Ultrasonics Symposium
Conference IEEE International Ultrasonics Symposium (IUS), Washington, DC, SEP 06-09, 2017
Date 2017
Publisher New York, Ieee
ISSN 1948-5719
ISBN 978-1-5386-3383-0
Keywords
DOI https://doi.org/10.1109/ULTSYM.2017.8091929
Other identifier(s) View record in Web of Science
Laboratories LC
Record Appears in Scientific production and competences > STI - School of Engineering > STI Archives > LC - Ceramics Laboratory
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Record creation date 2018-01-15