A reproducible method for μm precision alignment of PDMS microchannels with on-chip electrodes using a mask aligner

This paper describes a reproducible method for μm precision alignment of polydimethylsiloxane (PDMS) microchannels with coplanar electrodes using a conventional mask aligner for lab-on-a-chip applications. It is based on the use of a silicon mold in combination with a PMMA sarcophagus for precise control of the parallelism between the top and bottom surfaces of molded PDMS. The alignment of the fabricated PDMS slab with electrodes patterned on a glass chip is then performed using a conventional mask aligner with a custom-made steel chuck and magnets. This technique allows to bond and align chips with a resolution of less than 2 μm.


Publié dans:
Biomicrofluidics, 11, 6, 064111
Année
2017
Publisher:
Melville, American Institute of Physics
ISSN:
1932-1058
Laboratoires:




 Notice créée le 2017-12-21, modifiée le 2018-12-03


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