000233613 001__ 233613
000233613 005__ 20181203024919.0
000233613 0247_ $$2doi$$a10.1063/1.5001145
000233613 022__ $$a1932-1058
000233613 02470 $$2ISI$$a000418949900001
000233613 037__ $$aARTICLE
000233613 245__ $$aA reproducible method for μm precision alignment of PDMS microchannels with on-chip electrodes using a mask aligner
000233613 260__ $$bAmerican Institute of Physics$$c2017$$aMelville
000233613 269__ $$a2017
000233613 300__ $$a7
000233613 336__ $$aJournal Articles
000233613 520__ $$aThis paper describes a reproducible method for μm precision alignment of polydimethylsiloxane (PDMS) microchannels with coplanar electrodes using a conventional mask aligner for lab-on-a-chip applications. It is based on the use of a silicon mold in combination with a PMMA sarcophagus for precise control of the parallelism between the top and bottom surfaces of molded PDMS. The alignment of the fabricated PDMS slab with electrodes patterned on a glass chip is then performed using a conventional mask aligner with a custom-made steel chuck and magnets. This technique allows to bond and align chips with a resolution of less than 2 μm.
000233613 700__ $$aCottet, J.
000233613 700__ $$aVaillier, C.
000233613 700__ $$aBuret, F.
000233613 700__ $$aFrénéa-Robin, M.
000233613 700__ $$aRenaud, P.
000233613 773__ $$j11$$tBiomicrofluidics$$k6$$q064111
000233613 909C0 $$xU10324$$0252064$$pLMIS4
000233613 909CO $$pSTI$$particle$$ooai:infoscience.tind.io:233613
000233613 917Z8 $$x113143
000233613 937__ $$aEPFL-ARTICLE-233613
000233613 973__ $$rREVIEWED$$sPUBLISHED$$aEPFL
000233613 980__ $$aARTICLE