Thermal Probe Nanopatterning Enables Nanoparticle Assembly on PDMS Substrates

In this work, we demonstrate a nanofabrication technique based on thermal scanning probe lithography (t-SPL), PDMS molding, and bottom-up capillary-assisted particle assembly (CAPA). The repeatability of the pattern transfer from the thermal sensitive polymer poly-phthalaldehyde (PPA) to PDMS is studied. Moreover, after the pattern transfer, the gold nano-rods assembly on PDMS substrates with different trap designs is also demonstrated.


Advisor(s):
Brugger, Jürgen
Presented at:
43rd International Conference on Micro and NanoEngineering, Braga, Portugal, September 18-22, 2017
Year:
2017
Keywords:
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 Record created 2017-12-17, last modified 2018-09-13

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