Lowering motional resistance by partially HfO2 gap filling in double-ended tuning fork MEMS resonators.


Published in:
2017 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFC), 805-806
Presented at:
2017 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium ((EFTF/IFC), BESANÇON, France, 9-13 July 2017
Year:
2017
Publisher:
IEEE
Laboratories:




 Record created 2017-11-17, last modified 2018-09-13


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