Combination of additive and subtractive laser 3D microprocessing in hybrid glass/polymer microsystems for chemical sensing applications

We present a novel hybrid glass-polymer micromechanical sensor by combining two femtosecond laser direct writing processes: laser illumination followed by chemical etching of glass and two-photon polymerization. This incorporation of techniques demonstrates the capability of combining mechanical deformable devices made of silica with an integrated polymer structure for passive chemical sensing application. We demonstrate that such a sensor could be utilized for investigating the elastic properties of polymeric microstructures fabricated via the two-photon polymerization technique. Moreover, we show that polymeric microstructure stiffness increases when immersed in organic liquids. (C) 2017 Optical Society of America


Publié dans:
Optics Express, 25, 21, 26280-26288
Année
2017
Publisher:
Washington, Optical Society of America
ISSN:
1094-4087
Mots-clefs:
Laboratoires:




 Notice créée le 2017-11-08, modifiée le 2018-09-13


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