Silk Fibroin as a Resist for Thermal Scanning Probe Lithography

We present for the first time nano-scale patterning of silk fibroin with a thermal scanning probe to locally convert water-insoluble crystalline silk into the water-soluble phase. Our first experiments demonstrate silk as a fully water-based resist for thermal scanning probe lithography with an achieved half-pitch resolution of 50.5±3 nm.


Présenté à:
43rd Micro and Nano Engineering Conference, Braga, Portugal, September 18-22, 2017
Année
2017
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Note: Le statut de ce fichier est: Seulement EPFL


 Notice créée le 2017-10-09, modifiée le 2019-03-17

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