000231425 001__ 231425
000231425 005__ 20190317000836.0
000231425 037__ $$aPOST_TALK
000231425 245__ $$aSilk Fibroin as a Resist for Thermal Scanning Probe Lithography
000231425 269__ $$a2017
000231425 260__ $$c2017
000231425 336__ $$aTalks
000231425 520__ $$aWe present for the first time nano-scale patterning of silk fibroin with a thermal scanning probe to locally convert water-insoluble crystalline silk into the water-soluble phase. Our first experiments demonstrate silk as a fully water-based resist for thermal scanning probe lithography with an achieved half-pitch resolution of 50.5±3 nm.
000231425 6531_ $$aThermal scanning probe lithography
000231425 6531_ $$aSilk fibroin
000231425 6531_ $$aNanofabrication
000231425 700__ $$aZimmermann, Samuel
000231425 700__ $$0249133$$g258547$$aWang, Ya
000231425 700__ $$0248325$$g249464$$aZhang, Xiaosheng
000231425 700__ $$g145781$$aBrugger, Jürgen$$0240120
000231425 7112_ $$dSeptember 18-22, 2017$$cBraga, Portugal$$a43rd Micro and Nano Engineering Conference
000231425 8564_ $$uhttps://infoscience.epfl.ch/record/231425/files/MNE2017%20Abstract_Samuel%20Zimmermann_v7.pdf$$zAbstract $$s267624$$yAbstract 
000231425 8564_ $$uhttps://infoscience.epfl.ch/record/231425/files/Silk_t-SPL_MNE2017_SZi.pdf$$zPublisher's version$$s1380735$$yPublisher's version
000231425 909C0 $$xU10321$$0252040$$pLMIS1
000231425 909CO $$qGLOBAL_SET$$pSTI$$ooai:infoscience.tind.io:231425$$ppresentation
000231425 917Z8 $$x244428
000231425 937__ $$aEPFL-TALK-231425
000231425 973__ $$aEPFL
000231425 980__ $$aTALK