English
Français
Search
Browse Collections
Help
English
Français
login
login
Home
> >
Low Impedance ALD HfO2 Partially-Filled-Gap Flexural and Bulk MEMS Resonators Piezoresistively Detected for Distributed Mass Sensing
> Access to Fulltext
Information
Usage statistics
Files
Low Impedance ALD HfO2 Partially-Filled-Gap Flexur[...]
-
Lopez, Mariazel Maqueda
et al
main
file(s):
proceedings-01-00391-v2
version 1
proceedings-01-00391-v2.pdf
[971.12 KB]
03 Nov 2020, 14:24
Postprint