000230628 001__ 230628
000230628 005__ 20181203024817.0
000230628 0247_ $$2doi$$a10.1021/acsami.7b07762
000230628 022__ $$a1944-8244
000230628 02470 $$2ISI$$a000406646300009
000230628 037__ $$aARTICLE
000230628 245__ $$aProbing the Morphology and Evolving Dynamics of 3D Printed Nanostructures Using High-Speed Atomic Force Microscopy
000230628 260__ $$bAmer Chemical Soc$$c2017$$aWashington
000230628 269__ $$a2017
000230628 300__ $$a6
000230628 336__ $$aJournal Articles
000230628 520__ $$aFocused electron beam induced deposition (FEBID) has been demonstrated as a promising solution for synthesizing truly three-dimensional (3D) nanostructures. However, the lack of morphological feedback during growth complicates further development toward higher spatial fabrication precision. Here, we show that by combining in situ high speed atomic force microscopy (HS-AFM) with FEBID, morphologies in multistep fabrication process can be accessed. More importantly, the proposed method enables simultaneous imaging and fabrication operation, which opens new possibilities to investigate evolving mechanical properties of the deposit. The experiments indicate an exponential increase law of the mechanical resistance, meaning that a mechanically stable state establishes around 4 min after deposition.
000230628 6531_ $$afocused electron beam induced deposition
000230628 6531_ $$ahigh-speed atomic force microscopy
000230628 6531_ $$amorphology feedback
000230628 6531_ $$aevolving dynamics
000230628 6531_ $$ain situ characterization
000230628 700__ $$0247786$$g242524$$uHarbin Inst Technol, State Key Lab Robot & Syst, Yikuang St 2, Harbin 150080, Heilongjiang, Peoples R China$$aYang, Chen
000230628 700__ $$uGraz Ctr Elect Microscopy, Steyrergasse 17, A-8010 Graz, Austria$$aWinkler, Robert
000230628 700__ $$0245745$$g212854$$uEcole Polytech Fed Lausanne, Interfac Inst Bioengn, Lab Bio & Nanoinstrumentat, Batiment BM 3109 Stn 17, CH-1015 Lausanne, Switzerland$$aDukic, Maja
000230628 700__ $$uHarbin Inst Technol, State Key Lab Robot & Syst, Yikuang St 2, Harbin 150080, Heilongjiang, Peoples R China$$aZhao, Jie
000230628 700__ $$uGraz Ctr Elect Microscopy, Steyrergasse 17, A-8010 Graz, Austria$$aPlank, Harald
000230628 700__ $$aFantner, Georg. E.$$g199129$$0244716
000230628 773__ $$j9$$tAcs Applied Materials & Interfaces$$k29$$q24456-24461
000230628 909C0 $$xU12183$$0252332$$pLBNI
000230628 909CO $$pSTI$$particle$$ooai:infoscience.tind.io:230628
000230628 917Z8 $$x175044
000230628 937__ $$aEPFL-ARTICLE-230628
000230628 973__ $$rREVIEWED$$sPUBLISHED$$aEPFL
000230628 980__ $$aARTICLE