Binary zero-order diffractive and anti-reflective optical elements in silicon for the mid-infrared

We propose a novel method for the design of binary 2-level diffractive optical elements that provide an efficient diffractive function while reducing the reflectivity of a high-index interface. The structure can be fabricated with a single patterning step and is particularly useful for the mid-infrared spectral range. The concept is based on zero-order transmission gratings using subwavelength micro-structures. To demonstrate the concept a Dammann grating has been realized in silicon and characterized in the mid-infrared by scanning the far-field intensity distribution.


Published in:
Optics Letters, 42, 16, 3233-3235
Year:
2017
Publisher:
Washington, Optical Society of America
ISSN:
0146-9592
Keywords:
Laboratories:




 Record created 2017-08-31, last modified 2018-03-17


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