3d nano-electro-mechanical multiple-state carbon nanotube device structures and methods of fabrication
2013
Abstract
A 3D M-CNT structure with at least one tri-state CNT NEM switch comprising at least an electrode as a source, an electrode as a gate and an electrode as a drain, a conductive carbon nanotube which is able to take three positions depending on a voltage application to said electrodes.
Details
Title
3d nano-electro-mechanical multiple-state carbon nanotube device structures and methods of fabrication
Author(s)
Cao, Ji ; Ionescu, Mihai Adrian
Date
2013
Keywords
Other identifier(s)
EPO Family ID: 49580572
Patent number(s)
US9117889 (B2)
US2013306937 (A1)
US2013306937 (A1)
Laboratories
TTO
Record Appears in
Scientific production and competences > Non-academic units > TTO - Technology Transfer Office
Work produced at EPFL
Patents
Work produced at EPFL
Patents
Record creation date
2017-06-13