3d nano-electro-mechanical multiple-state carbon nanotube device structures and methods of fabrication
Cao, Ji; Ionescu, Mihai Adrian
2013

Abstract

A 3D M-CNT structure with at least one tri-state CNT NEM switch comprising at least an electrode as a source, an electrode as a gate and an electrode as a drain, a conductive carbon nanotube which is able to take three positions depending on a voltage application to said electrodes.

Details

Title 3d nano-electro-mechanical multiple-state carbon nanotube device structures and methods of fabrication
Author(s) Cao, Ji ; Ionescu, Mihai Adrian
Date 2013
Keywords
Other identifier(s) EPO Family ID: 49580572
Patent number(s) US9117889 (B2)
US2013306937 (A1)
Laboratories TTO
Record Appears in Scientific production and competences > Non-academic units > TTO - Technology Transfer Office
Work produced at EPFL
Patents
Record creation date 2017-06-13

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