Lithographic patterning of insulating or semiconducting solid state material in crystalline form

A method for lithographic patterning of an insulating or semiconducting solid state material in crystalline form, said method comprising a step where said material is exposed to an amount of radiation which is sufficient to change its insulating or semiconducting state into a conducting state.


Year:
2014
Other identifiers:
EPO Family ID: 50000030
TTO: 6.1204
Laboratories:




 Record created 2017-05-24, last modified 2018-03-17


Rate this document:

Rate this document:
1
2
3
 
(Not yet reviewed)