The invention concerns a pressure transducer comprising a deflecting membrane, said membrane comprising two piezoresistors (10, 11) of different types, said piezoresistors being arranged such that a same stress or a same strain is applied on said piezoresistors and said piezoresistors (10, 11) yield changes in resistance, wherein a piezoresistor of a first type (10) is positioned such that its current direction is perpendicular to the stress direction (trans verse) and a piezoresistor of a second type is parallel to the stress direction (longitudinal), allowing, when a tensile stress is applied to the transducer, said piezoresistor of the first type to increase its resistance and said piezoresistor of the second type to decrease the resistance; or when a compressive stress is applied to the transducer, said piezoresistor of the first type to decrease its resistance and said piezoresistor of the second type to increase the resistance; wherein said piezoresistor of the first type (10) has a specific width and a length as short as possible and said piezoresistor (11) of the second type has a width as short as possible and a length as long as possible.
47297334
Alternative title(s) : (de) Sic-hochtemperatur-druckwandler (fr) Transducteur de pression haute température sic
TTO:6.1052
Patent number | Country code | Kind code | Date issued |
EP2769191 | EP | B1 | 2020-03-04 |
US9557230 | US | B2 | 2017-01-31 |
US2014238144 | US | A1 | 2014-08-28 |
EP2769191 | EP | A1 | 2014-08-27 |
WO2013057689 | WO | A1 | 2013-04-25 |