Waveguide Fabrication Method

A waveguide fabrication method including the steps of providing a substrate including at least one waveguide recess structure and a stress release recess structure for receiving a waveguide material, and depositing the waveguide material onto the substrate and into both the waveguide recess structure and the stress release recess structure.


Année
2016
Autres identifiants:
EPO Family ID: 57221860
TTO: 6.1485
Numéro(s) de brevet :
Laboratoires:




 Notice créée le 2017-05-11, modifiée le 2018-12-21


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