Waveguide Fabrication Method

A waveguide fabrication method including the steps of providing a substrate including at least one waveguide recess structure and a stress release recess structure for receiving a waveguide material, and depositing the waveguide material onto the substrate and into both the waveguide recess structure and the stress release recess structure.


Year:
2016
Other identifiers:
EPO Family ID: 57221860
TTO: 6.1485
Patent number(s):
Laboratories:




 Record created 2017-05-11, last modified 2018-12-21


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