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000228106 005__ 20181221101922.0
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000228106 037__ $$aPATENT
000228106 245__ $$aWaveguide Fabrication Method
000228106 269__ $$a2016
000228106 260__ $$c2016
000228106 336__ $$aPatents
000228106 520__ $$aA waveguide fabrication method including the steps of providing a substrate including at least one waveguide recess structure and a stress release recess structure for receiving a waveguide material, and depositing the waveguide material onto the substrate and into both the waveguide recess structure and the stress release recess structure.
000228106 700__ $$0244694$$aKippenberg, Tobias$$g182444
000228106 700__ $$0247648$$aPfeiffer, Martin Hubert Peter$$g203731
000228106 700__ $$0248692$$aKordts, Arne$$g224397
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000228106 909C0 $$0252348$$pLPQM
000228106 909CO $$ooai:infoscience.tind.io:228106$$pSTI$$pSB
000228106 917Z8 $$x222695
000228106 937__ $$aEPFL-PATENT-228106
000228106 973__ $$aEPFL
000228106 980__ $$aPATENT