Tuning the resonance frequencies and mode shapes in a large range multi-degree of freedom micromirror

The ability to actively shift the primary resonance of a 2D scanning micromirror allows the user to set the scanning direction, set the scanning frequency, and lift otherwise degenerate modes in a symmetrically designed system. In most cases, resonant scanning micromirrors require frequency stability in order to perform imaging and projection functions properly. This paper suggests a method to tune the tip and tilt resonant frequencies in real time while actively suppressing or allowing degeneracy of the two modes in a symmetric electrothermal micromirror. We show resonant frequency tuning with a range of degeneracy separation of 470 Hz or by approximately +/- 15% and controllable coupling. (C)2017 Optical Society of America


Published in:
Optics Express, 25, 7, 7895-7906
Year:
2017
Publisher:
Washington, Optical Soc Amer
ISSN:
1094-4087
Laboratories:




 Record created 2017-05-01, last modified 2018-03-17


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