000226081 001__ 226081
000226081 005__ 20190317000639.0
000226081 022__ $$a0963-0252
000226081 0247_ $$2doi$$a10.1088/1361-6595/aa59d6
000226081 037__ $$aARTICLE
000226081 245__ $$aElectromagnetic, complex image model of a large area RF resonant antenna as inductive plasma source
000226081 269__ $$a2017
000226081 260__ $$c2017
000226081 336__ $$aJournal Articles
000226081 520__ $$aA large area antenna generates a plasma by both inductive and capacitive coupling; it is an electromagnetically coupled plasma source. In this work, experiments on a large area planar RF antenna source are interpreted in terms of a multi-conductor transmission line coupled to the plasma. This electromagnetic treatment includes mutual inductive coupling using the complex image method, and capacitive matrix coupling between all elements of the resonant network and the plasma. The model reproduces antenna input impedance measurements, with and without plasma, on a 1.2x1.2 m2 antenna used for large area plasma processing. Analytic expressions are given, and results are obtained by computation of the matrix solution. This method could be used to design planar inductive sources in general, by applying the termination impedances appropriate to each antenna type.
000226081 6531_ $$aIndustrial Plasmas
000226081 6531_ $$acomplex image theory
000226081 6531_ $$aresonant antennas
000226081 6531_ $$ainductive plasmas
000226081 700__ $$g101798$$aGuittienne, Philippe$$0242239
000226081 700__ $$g174884$$aJacquier, Rémy$$0(EPFLAUTH)174884
000226081 700__ $$g105426$$aHowling, Alan$$0241906
000226081 700__ $$g111055$$aFurno, Ivo$$0240068
000226081 773__ $$k3$$j26$$tPlasma Sources Science and Technology$$q035010
000226081 8560_ $$falain.borel@epfl.ch
000226081 8564_ $$uhttps://infoscience.epfl.ch/record/226081/files/Guittienne_2017_PSST_26_035010.pdf$$zPublisher's version$$s1563793$$yPublisher's version
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000226081 909CO $$qGLOBAL_SET$$pSB$$particle$$ooai:infoscience.tind.io:226081
000226081 917Z8 $$x111055
000226081 937__ $$aEPFL-ARTICLE-226081
000226081 973__ $$rREVIEWED$$sPUBLISHED$$aEPFL
000226081 980__ $$aARTICLE