Conference paper

Near-Field Integration of a Si3N4 Nanobeam and a SiO2 Microcavity for Heisenberg-Limited Displacement Sensing

A single-chip radio-frequency optomechanical system, consisting of a Si3N4 nanobeam in the evanescent near-field of a SiO2 optical microdisk resonator realizes displacement imprecision >30dB below the standard quantum limit at room-temperature.


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