Hybrid BAW/SAW AlN and AlScN Thin Film Resonator First Experimental data

A novel type of hybrid resonator based on BAW transformation into SAW in a ridged layered structure was fabricated and characterized. Bulk waves are excited by micromachined piezoelectric AlScN pillars located on the non-piezoelectric Si and sapphire substrates. The effect of film thickness and etching depth on the electromechanical coupling and velocity dispersion were calculated by finite element simulation. Resonators of various geometries were fabricated. Maximum effective coupling coefficient of 3.8% was achieved with a 3 um thick Al0.85Sc0.15N film on a sapphire substrate.


Published in:
2016 Ieee International Ultrasonics Symposium (Ius)
Presented at:
IEEE International Ultrasonics Symposium (IUS), Tours, FRANCE, SEP 18-21, 2016
Year:
2016
Publisher:
New York, Ieee
ISSN:
1948-5719
ISBN:
978-1-4673-9897-8
Keywords:
Laboratories:




 Record created 2017-01-24, last modified 2018-09-13


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