Die Level Release of Silicon Photonic MEMS
Jacobs, Jonas; Graziosi, Teodoro; Kiss, Marcell; Han, Sangyoon; Scok, Tae Joon; Wu, Ming C.; Quack, Niels
2016

Abstract

We demonstrate a die level release process for silicon photonic MEMS structures, that is compatible with dies from a standard silicon photonics foundry process which are only several square millimeters in size.

Details

Title Die Level Release of Silicon Photonic MEMS
Author(s) Jacobs, Jonas ; Graziosi, Teodoro ; Kiss, Marcell ; Han, Sangyoon ; Scok, Tae Joon ; Wu, Ming C. ; Quack, Niels
Published in 2016 International Conference On Optical Mems And Nanophotonics (OMN)
Pagination 2
Series International Conference on Optical MEMS and Nanophotonics
Conference International Conference on Optical MEMS and Nanophotonics (OMN)
Date 2016
Publisher New York, IEEE
ISSN 2160-5033
ISBN 978-1-5090-1035-6
Keywords
DOI https://doi.org/10.1109/OMN.2016.7565832
Other identifier(s) View record in Web of Science
Laboratories Q-LAB
Record Appears in Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > Q-LAB - Quack Group
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Record creation date 2017-01-24

Actions