000221639 001__ 221639
000221639 005__ 20180913063911.0
000221639 0247_ $$2doi$$a10.1109/SNW.2016.7577990
000221639 02470 $$2ISI$$a000391250500031
000221639 037__ $$aCONF
000221639 245__ $$aSolid-gap resonators based on PVDF-TrFE
000221639 269__ $$a2016
000221639 260__ $$bIEEE$$c2016$$aNew York
000221639 300__ $$a2
000221639 336__ $$aConference Papers
000221639 520__ $$aHigh frequency wine-glass mode bulk MEMS resonators actuated by means of capacitive transduction have been fabricated by using solid-gaps based on polyvinylidenefluoride-trifluoroethylene (PVDF-TrFE). The fabrication process flow of patterned PVDF-TrFE gaps applied in RF MEMS is presented for the first time. Measurements of the polarization of the material and the frequency and voltage dependence of the capacitance in the actuation gaps of the resonators are provided.
000221639 700__ $$aLopez, Mariazel Maqueda
000221639 700__ $$0247224$$g213975$$aCasu, Emanuele Andrea
000221639 700__ $$0245556$$g196349$$aVitale, Wolfgang Amadeus
000221639 700__ $$0241430$$g122431$$aIonescu, Adrian Mihai
000221639 7112_ $$d12-13 June 2016$$cHonolulu, HI, USA$$a2016 IEEE Silicon Nanoelectronics Workshop (SNW)
000221639 773__ $$t2016 IEEE Silicon Nanoelectronics Workshop (SNW)$$q72-73
000221639 909C0 $$xU10328$$0252177$$pNANOLAB
000221639 909C0 $$xU10383$$0252168$$pCMI
000221639 909CO $$pconf$$pSTI$$ooai:infoscience.tind.io:221639
000221639 917Z8 $$x213975
000221639 937__ $$aEPFL-CONF-221639
000221639 973__ $$rNON-REVIEWED$$sPUBLISHED$$aEPFL
000221639 980__ $$aCONF