Suspended micro-resonator fabrication: fusion bonding of Silicon Nitride interfaces

This project aims to prove of the feasibility of Silicon Fusion Bonding for fabrication of micro- capillaries for gas cooling down. An optimal recipe for Silicon Fusion Bonding is developed, consisting of four steps: RCA cleaning, surface activation with O2 plasma and rehydration, manual pre-bonding and final annealing. Also a study of the influence of the speed of annealing on the bonding strength is conducted.


Advisor(s):
Villanueva, Guillermo
Year:
2016
Keywords:
Laboratories:




 Record created 2016-09-05, last modified 2018-03-17

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