Anchor Losses Dependence on Electrode Material in Contour Mode Resonators
Lozzi, Andrea; Yen, Ernest Ting Ta; Villanueva, Guillermo
2016

Files

Abstract

We here present a study on the influence of metal electrodes on the anchor losses in Contour Mode Resonators (CMRs). Our Finite Element Modelling (FEM) simulation results show that electrode material is key to determine the acoustic losses, and therefore the quality factor. Also, improvement in, quality factor, can be achieved via acoustic matching between the electrodes and the active piezoelectric layer.

Details

Title Anchor Losses Dependence on Electrode Material in Contour Mode Resonators
Author(s) Lozzi, Andrea ; Yen, Ernest Ting Ta ; Villanueva, Guillermo
Published in 2016 IEEE International Frequency Control Symposium (IFCS)
Pagination 4
Pages 100-103
Conference 2016 IEEE International Frequency Control Symposium, New Orleans, Luisiana, USA, May 9-12, 2016
Date 2016
Publisher New York, Ieee
ISBN 978-1-5090-2091-1
Keywords
DOI https://doi.org/10.1109/FCS.2016.7546736
Other identifier(s) View record in Web of Science
Laboratories NEMS
Record Appears in Scientific production and competences > STI - School of Engineering > IGM - Institute of Mechanical Engineering > NEMS - Advanced Nano-electromechanical Systems Laboratory
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Record creation date 2016-08-26

Actions

Preview