Lithographic and Micromachining Techniques for Optical Component Fabrication
2001
Details
Title
Lithographic and Micromachining Techniques for Optical Component Fabrication
Editor(s)
Series
Proceedings of SPIE, 4440
Conference
Lithographic and Micromachining Techniques for Optical Component Fabrication, San Diego, CA, USA, July 29-30, 2001
Date
2001
Publisher
Bellingham, Washington, SPIE
ISBN
0-8194-4154-6
Laboratories
OPT
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > OPT - Optics and Photonics Technology Laboratory
Conference Proceedings
Work produced at EPFL
Conference Proceedings
Work produced at EPFL
Record creation date
2016-05-26