Infoscience

Conference proceedings

Lithographic and Micromachining Techniques for Optical Component Fabrication

Editors: Kley, Ernst-Bernhard; Herzig, Hans Peter
  • Presented at: Lithographic and Micromachining Techniques for Optical Component Fabrication, San Diego, CA, USA, July 29-30, 2001
  • Series: Proceedings of SPIE 4440
  • Bellingham, Washington: SPIE, 2001

    Reference

    • EPFL-PROC-218547

    Record created on 2016-05-26, modified on 2017-05-10

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