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Lithographic and Micromachining Techniques for Optical Component Fabrication

Kley, Ernst-Bernhard ; Herzig, Hans Peter

Presented at:
Lithographic and Micromachining Techniques for Optical Component Fabrication, San Diego, CA, USA, July 29-30, 2001
Year:
2001
Publisher:
Bellingham, Washington, SPIE
ISBN:
0-8194-4154-6
Laboratories:
OPT

Record appears in:
Scientific production and competences > STI - School of Engineering > IMT - Institute of Microengineering > OPT - Optics and Photonics Technology Laboratory
Conference Proceedings



 Record created 2016-05-26, last modified 2018-09-13


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