Fabrication of suspended hollow micro-resonators integrated with PZE electrodes
De Pastina, Annalisa; Villanueva, Guillermo
2015

Abstract

Fabrication of suspended hollow micro-resonators integrated with PZE electrodes

Details

Title Fabrication of suspended hollow micro-resonators integrated with PZE electrodes
Author(s) De Pastina, Annalisa ; Villanueva, Guillermo
Conference 18th Conference in NanoBioTech, Montreux, November 2015
Date 2015
Laboratories NEMS
Record Appears in Scientific production and competences > STI - School of Engineering > IGM - Institute of Mechanical Engineering > NEMS - Advanced Nano-electromechanical Systems Laboratory
Work produced at EPFL
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Record creation date 2016-03-18

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