Pyrolysed carbon resonators – Fabrication and characterization
Amato, Letizia; Amato, Bartolo; Villanueva, Guillermo; Emnéus, J.; Heiskanen, A.; Keller, S.S.; Boisen, A.; Schmid, S.
2013

Abstract

Study of resonators composed of silicon nitride and pyrolysed carbon.

Details

Title Pyrolysed carbon resonators – Fabrication and characterization
Author(s) Amato, Letizia ; Amato, Bartolo ; Villanueva, Guillermo ; Emnéus, J. ; Heiskanen, A. ; Keller, S.S. ; Boisen, A. ; Schmid, S.
Conference 39th International Conference on Micro- and Nano- Engineering (MNE), 2013, London, September, 2013
Date 2013
Laboratories NEMS
Record Appears in Scientific production and competences > STI - School of Engineering > IGM - Institute of Mechanical Engineering > NEMS - Advanced Nano-electromechanical Systems Laboratory
Work outside EPFL
Posters
Record creation date 2016-03-17

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