000217300 001__ 217300
000217300 005__ 20180913063631.0
000217300 0247_ $$2doi$$a10.1364/OPTICA.3.000020
000217300 022__ $$a2334-2536
000217300 02470 $$2ISI$$a000370815300004
000217300 037__ $$aARTICLE
000217300 245__ $$aPhotonic Damascene process for integrated high-Q microresonator based nonlinear photonics
000217300 260__ $$aWashington$$bOptical Soc Amer$$c2016
000217300 269__ $$a2016
000217300 300__ $$a6
000217300 336__ $$aJournal Articles
000217300 520__ $$aHigh confinement, integrated silicon nitride (SiN) waveguides have recently emerged as an attractive platform for on-chip nonlinear optical devices. The fabrication of high-Q SiN microresonators with anomalous group velocity dispersion has enabled broadband nonlinear optical frequency comb generation. Such frequency combs have been successfully applied in coherent communication and ultrashort pulse generation. However, the reliable fabrication of high confinement waveguides from stoichiometric, high stress SiN remains challenging. Here we present a novel photonic Damascene fabrication process enabling the use of substrate topography for stress control and thin film crack prevention. With close to unity sample yield we fabricate microresonators with 1.35 mu m thick waveguides and optical Q-factors of 3.7 x 10(6) and demonstrate single temporal dissipative Kerr soliton based coherent optical frequency comb generation. Our newly developed process is also interesting for other material platforms, photonic integration, and mid-infrared Kerr comb generation. (C) 2016 Optical Society of America
000217300 700__ $$0247648$$aPfeiffer, Martin H. P.$$g203731
000217300 700__ $$0248692$$aKordts, Arne$$g224397
000217300 700__ $$0246098$$aBrasch, Victor$$g221444
000217300 700__ $$0242444$$aZervas, Michael$$g176318
000217300 700__ $$0248282$$aGeiselmann, Michael$$g248560
000217300 700__ $$0246613$$aJost, John D.$$g229108
000217300 700__ $$0244694$$aKippenberg, Tobias J.$$g182444
000217300 773__ $$j3$$k1$$q20$$tOptica
000217300 909C0 $$0252348$$pLPQM
000217300 909CO $$ooai:infoscience.tind.io:217300$$particle$$pSB$$pSTI
000217300 917Z8 $$x222695
000217300 937__ $$aEPFL-ARTICLE-217300
000217300 973__ $$aEPFL$$rNON-REVIEWED$$sPUBLISHED
000217300 980__ $$aARTICLE