Monolithic fabrication of silicon nanowires bridging thick silicon structures
2015
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Title
Monolithic fabrication of silicon nanowires bridging thick silicon structures
Author(s)
Tasdemir, Zuhal ; Peric, Oliver ; Sacchetto, Davide ; Fantner, Georg ; Leblebici, Yusuf ; Alaca, B.E.
Published in
IEEE Nanotechnology Express
Volume
1
Pages
2-5
Date
2015
Record Appears in
Scientific production and competences > STI - School of Engineering > IBI-STI - Interfaculty Institute of Bioengineering > LBNI - Laboratory for Bio- and Nano-Instrumentation
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > LSM - Microelectronic Systems Laboratory
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > LSM - Microelectronic Systems Laboratory
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Record creation date
2015-12-10