Fabrication of multilayered nanofluidic membranes through silicon templates

We present a new fabrication method for solid-state nanoporous membranes based on sacrificial template structures made of silicon. The process consists of creating membranes by evaporating thin-films on sacrificial templates which, after their selective removal, opens the nanopores and releases the free-standing membranes. This way it is possible to define the geometry of the pore by design and to build the membrane by stacking thin-films of various materials through evaporation. Such a membrane with controlled porosity, pore geometry, thickness and nano-channel composition provides new opportunities for selective chemical functionalization, gating, electrical sensing or electrical stimulation inside the nanopore.


Published in:
Nanoscale, 7, 48, 20451-20459
Year:
2015
ISSN:
2040-3372
Laboratories:


Note: The status of this file is: EPFL only


 Record created 2015-12-07, last modified 2018-03-17

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