Heated mask

The invention concerns a method and a device wherein a stencil is provided with an integrated microhotplate on the stencil membrane to prevent aperture clogging, whereby the stencil can be locally heated up in order to minimize material condensation, remove clogging and control the resolution of the deposited material by deforming the membrane towards or away from a substrate.


Year:
2013
Other identifiers:
TTO: 6.1074
EPO Family ID: 46508121
Laboratories:




 Record created 2015-09-22, last modified 2018-03-18


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