Method for deposition of a sensor on a conductive substrate
Bruehwiler, Beat; Haelg, Maurice; Marti, Gaetan; Rey, Cedric
2008

Abstract

The process comprises the step of deposition of a sensor and of a part or of the entirety of a treatment unit on a not necessarily planar conductive surface by a soft lithography technique.

Details

Title Method for deposition of a sensor on a conductive substrate
Author(s) Bruehwiler, Beat ; Haelg, Maurice ; Marti, Gaetan ; Rey, Cedric
Date 2008
Keywords
Note Alternative title(s) : (fr) Procede pour deposer un capteur sur un substrat conducteur
Other identifier(s) EPO Family ID: 38459417
Patent number(s) WO2007099499 (A3)
WO2007099499 (A2)
Laboratories LSRO
TTO
Record Appears in Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > LSRO - Robotic Systems Laboratory
Scientific production and competences > Non-academic units > TTO - Technology Transfer Office
Work produced at EPFL
Patents
Record creation date 2015-09-22

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