Hyperbranched polymer for micro devices
The invention relates to novel polymer-based microstructures, with outstanding shape accuracy and cost-effective processing. The novel polymers are based on hyperbranched macromolecules and enable remarkable property combination such as reduced shrinkage and associated low stress, high shape fidelity and high aspect ratio in patterned microstructures, with additional benefit of fast and low-cost production methods. The invention also relates to methods to produce these microstructures. The polymer-based microstructures are relevant for, but not limited to micro- and nano- technologies applications, including lab-on-a-chip devices, opto-electronic and micro- electromechanical devices, optical detection methods, in fields of use as diverse as automotive, aerospace, information technologies, medical and biotechnologies, and energy systems.
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Record created on 2015-09-22, modified on 2016-08-09